One Transducer

Vacuum measurement principles can be classified as direct and indirect. While the former measurement principles are based on a direct interaction of the gas molecules with the sensor, the latter rely on an indirect measurement over convection or gas ionization. The direct measurement principles feature inherent advantages concerning accuracy, repeatability, and reduced gas type dependence compared to the indirect measurement principles.

In comparison to competitive technologies, the patented microGauge measurement approach is the only measurement principle that covers the entire process range of industrial vacuum coating equipment. This competitive advantage allows the replacement of up to four sensors with a single one.